11-12 November 2024
EPIC Technology Meeting on Microelectronics and Photonics – Two Sides of One Coin
Munich, Germany



Please note, preferably register only one person per company for best possible networking.

The EPIC Microelectronics & Photonics Meeting aims to address technology and manufacturing challenges and opportunities in the microelectronics and photonics industries. Key industry actors from both fields will convene to explore how they can collaborate to solve each other’s problems and learn from one another. Participants from across the entire manufacturing value chain, including design, manufacturing, testing, packaging, equipment, and materials, will attend the event, which is known for its extensive networking opportunities. The meeting will be held in Munich in conjunction with the SEMICON Europa exhibition, which represents the semiconductor equipment and materials industry, and is conveniently located near Messe Munich.

Agenda

Optional agenda

10 November, 2024, Sunday 

19:00 – 22:00 EPIC Pre-event networking dinner at Weißes Brauhaus im Tal (address: Tal 7, 80331 Munich)

Agenda

11 November, 2024, Monday

12:00 – 13:00 registration and lunch @ Novotel München City Arnulfpark  (address: Arnulfstr. 57, 80636 Munich)
13:00 – 13:15 Welcoming words by EPIC, Carlos Lee & Ivan Nikitski

13:15 – 15:15 SESSION 1: Photonics for Microelectonics

  • KEYNOTE: YOLE GroupPhotonics and Semiconductors: 2 Sides of the Same Wafer – Jérome Mouly, Deputy Director (France)
  • Nokia Bell LabsElectro-optic Integration for Next Generation Optical Networks – Mohand Achouche, Director of Hardware Strategy (France)
  • KD – The Automotive Industry Drives a New Approach to Optical Communications – Carlos Pardo, CEO (Spain)
  • Vario optics – Advancing the Semiconductorisation of Photonic Chip Packaging – CTO, Nikolaus Flöry (Austria)
  • AMO A Photonic Research Foundry for Rapid Prototyping – Stephan Suckow, Group Leader Nanophotonics (Germany)
  • Black SemiconductorBlack Semiconductor : the Journey to a New Semiconductor Technology in Europe – Cedric Huyghebaert, Chief Technology Officer (Belgium)

15:15 – 16:00 Networking coffee break

16:00 – 18:00 SESSION 2: Metrology and Testing

  • MitutoyoApplications of Variable Focus Optical Systems in the Semiconductor and Photonics Industries – Lucas Redlarski, General Manager (The Netherlands)
  • HORIBAProgress in Optical Smart Sensing: Bridging the Gap from Lab to Fab – Marc Chaigneau, Semiconductors Market Manager (France)
  • Hitachi High-TechHitachi Hightech – Your Partner for Process Control and Metrology – Joerg Thuemmel, Applications Engineer Metrology (Germany)
  • O’Shenu TechnologiesTest Design Kit (TDK) for General Wafer Level Testing of Photonic Devices – Beibei Wu, Senior Engineer (Belgium)
  • FlexFunctional Product Qualification and Integration Tests – Stefano Bonifacio, Manufacturing Engineering Manager (Italy)
  • Keystone PhotonicsWafer-Level Testing of Photonic Devices – Philipp Dietrich, CEO (Germany)
  • LayTecConnected Metrology – Optical Wafer Characterization along the Semiconductor Manufacturing Chain – Johannes Zettler, Product Manager (Germany)

18:15 Departure and walk (approx. 15min) from conference venue to main dinner place
18:30 – 22:00 Networking Dinner at Augustinerkeller (address: Arnulfstr. 52, 80335 Munich)

12 November September, 2024, Tuesday

08:00 – 08:45 Welcoming coffee break

08:45 – 10:15 SESSION 3: Lithography

  • ZEISS Semiconductor Mask Solutions – Joerg Petschulat, Head of Global R&D (Germany)
  • Vistec Electron BeamWhat can Electron Beam Lithography contribute to the photonics community? – Mathias Haedrich, Product Manager  (Germany)
  • ObducatNanoimprint Enables Production of Photonic Components – Patrik Lundström, CEO (Sweden)
  • SCIL Nanoimprint SolutionsWafer-scale Nano- & Micro-optics for Lasers and Integrated Photonics Applications – Jeroen Visser, Quality & Business Development Manager (The Netherlands)
  • micro resist technologyMicro- and Nano Patterning by Innovative Photoresists and Photopolymers for Advanced Manufacture of Microelectronics and Photonics – Arne Schleunitz, Chief Technology Officer (Germany)
  • Dai Nippon PrintingExtreme Curvilinear by EUV Technology – Shingo Yoshikawa, Senior Technical Director (Japan)

10:15 – 11:00 Networking coffee break

11:00 – 12:15 SESSION 4: Advanced Processing

  • ELEMENT 3-5Next Level Epitaxy – Microelectronics and Photonics Become One!  – Ghassan Barbar, Sales Director (Germany)
  • EvatecCoating Solutions for Augmented Reality – Clau Maissen, Senior Product Marketing Manager, Compound & Photonics (Germany)
  • EV GroupRecent Advances in Bonding and Related Processes for Photonics Applications – Anton Alexeev, Business Development Manager (Belgium)
  • LASEA Upscaling of Femtosecond Micromachining Processes Applied to Electronics – David Bruneel, Innovation Manager (Belgium)
  • ETELConnecting Semiconductor to Photonics – Bridging solutions to common challenges? – Hervé Stämpfli, Head of Systems Product Portfolio (Switzerland)

12:15 – 13:00 Networking lunch & End of the Technology Meeting
13:00  Bus transfer from Hotel Novotel München City Arnulfpark to Messe Munich, main entrance of SEMICON Europe & ELECTRONICA Fair

Conference Venue

Novotel München City Arnulfpark  (address: Arnulfstr. 57, 80636 Munich)

Accomodation

The recommended hotels are:
Novotel München City Arnulfpark  (address: Arnulfstr. 57, 80636 Munich)
Double room for single use including breakfast: night 10/11 for € 249, night 11/11 for € 350
Please send the reservation request to: H8866@accor.com, Keyword: EPIC Novotel

ibis Muenchen City Arnulfpark (address: Arnulfstrasse 55, 80636 Munich)
Double room for single use including breakfast: night 10/11 for € 143, night 11/11 for € 224
Please send the reservation request to: H8865@accor.com, Keyword: EPIC Ibis

Technology Advisory Committee
Technical Business Development Manager at imec
Director Photonic Solutions at Synopsys
Manager, Business Line Photonics at X-FAB
Group Technology Director at IQE
Business Development Manager at EVG
Speakers

Philipp-Immanuel Dietrich (Technology Fellow) is a Co-founder and CEO of Keystone Photonics, a company based in Karlsruhe, Germany that offers products and services for optical wafer-level testing using additive microfabrication. He is also a co-founder of Vanguard Automation, a company providing industry-grade machines and processes for photonic integration based on additive microfabrication. Philipp Dietrich received his PhD from the Karlsruhe Institute of Technology for his work on the fabrication and application of functional microstructures.

Hervé Stämpfli (Head of Systems Product Portfolio) obtained his Master of Science in Mechanical Engineering at the Swiss Federal Institute of Technology in Lausanne, Switzerland, in 1997. He started as an R&D engineer at ETEL, part of the HEIDENHAIN Corporate Group, in 1999, and has held various positions in R&D, sales and marketing over the past 25 years. Having led the Technical Sales department in Switzerland for a few years, he moved to the United States, where he was Technical Manager of the HEIDENHAIN subsidiary in Schaumburg, Illinois. After returning to Switzerland, Hervé took over the Motion System Product Management position and is now the Head of Systems Product Portfolio for the HEIDENHAIN Corporate Group.

Head of Systems Product Portfolio at ETEL

Marc Chaigneau (Semiconductors Market Manager, Metrology Leader) earned his Ph.D. in solid-state physics from the University of Nantes in 2007 and worked as a tenured researcher at École Polytechnique (2010 – 2015), focusing on nanoscale Raman systems for advanced material characterization. In 2015, he joined HORIBA Scientific to lead global SPM development and strategic marketing, receiving HORIBA’s IP Award in 2016 and the Presidential Achievement Award in 2020. Since 2020, Marc has been the Market Manager for Semiconductors at HORIBA France, leading the business development for technologies such as Raman, photoluminescence, and ellipsometry. In 2023, he also became HORIBA's head of Metrology, focusing on photomask, wafer, and thin film inspection.

Semiconductors Market Manager at HORIBA

Cedric Huyghebaert (CTO) is currently CTO at Black Semiconductor. Before that, he acted as Program manager of exploratory processes and modules at imec, dealing with material exploration and early module integration for functional applications. He was the initiator and the technical lead of the 2D experimental Pilot line division in the Graphene Flagship, a project which has the ambition to enforce the adoption of 2D materials by the semiconductor industry. In 1999, he started as a junior researcher in the materials and component analyses group at imec. He studied the oxygen bean interactions during sputtering profiling of semiconductors. He received his PhD in Physics in 2006 at the KULeuven in Belgium. In 2005, he joined imec’s pilot line as a support integration engineer, especially dealing with the process contamination control. He was part of the packaging group from end 2007 till begin 2010, working as a senior integration engineer dealing with 3D-stacked IC integration. From 2010 to 2019, he led the nano-applications and –material engineering (NAME) group at imec. He (co-)authored more than 250 peer reviewed journal and conference papers. He has a h-index of 43 and his work was cited >7200 times (google scholar).

Chief Technology Officer at Black Semiconductor

Jörg Petschulat (Head of Global R&D, Semiconductor Mask Solutions) studied physics at the Technical University of Chemnitz and Friedrich Schiller University in Jena, where he also completed his doctorate. He began his career in 2011 at the Corporate Research Center at ZEISS, where he was responsible for the Corporate Algorithm Lab until 2017. Since then, he has been the head of global research and development within a strategic business unit that belongs to the Semiconductor Manufacturing Technology division at ZEISS.

David Bruneel (Group Research Coordinator) joined LASEA in 2015. Group Research coordinator of LASEA, he has more than 15 years' experience in the research and development of innovative laser processes for all types of applications and also in the development of laser systems with different types of lasers (fibre lasers, ns, ps and fs, using different wavelengths) and optical systems for beam management or instrumentation. His experience includes several years at the Laboratoire Hubert Curien and the Fraunhofer IBMT research centre, as well as in industry in the manufacture of laser machines and the development and optimisation of USP micromachining processes. David is responsible for organising European and regional R&D projects that have led to cutting-edge developments/results/patents: AI supported laser parameters prediction, femtosecond kW laser demonstration, beam shaping, GHz cold ablation, simulation and prediction of laser-matter interaction, high-speed surface texturing, etc …. Among the projects, most are collaborative EU funded projects, he led we can cite: SLIDE, HIPERDIAS, LAMPAS, FUTURLAS 3D, POLAROLL, LASER4SURF, FEMTOTEXT, OPERATIC, GLASS, SYNTECS, NAVIC, etc...

Innovation Manager at Lasea

Carlos Pardo (CEO & Co-Founder) has a distinguished career as a manager in the microelectronics industry, excelling in leading R&D teams. He possesses extensive expertise in the high-tech silicon sector, encompassing both hardware and software development. Previously, he served as the Technical Director at SIDSA, where he managed R&D departments, product development, production, and customer support, among other responsibilities. Mr. Pardo also contributed significantly at Hewlett Packard SA Spain as an R&D engineer, handling various business functions, and at DS2 (Design of Systems on Silicon SA). He holds a degree in Industrial Engineering with a specialization in Industrial Electronics from Universidad Pontificia Comillas de Madrid (Spain).

CEO at KD

Mathias Haedrich (Product Manager / Sales Support) studied Physics at the Technical University of Ilmenau and Friedrich-Schiller University Jena. He received his PhD in Solid State Physics for research on thin-film solar cells. In 2011, he joined Vistec Electron Beam GmbH and became Project Manager of R&D projects and customer projects in Germany and USA. Since 2021, Mathias is in charge of Product Management and Regional Sales in Europe.

Product Manager  at Vistec Electron Beam

Lucas Redlarski (General Manager) joined Mitutoyo in 2012. His educational background is comprised of physics, mathematics, and computational science. In his current role as general manager at Mitutoyo Research Center Europe he overlaps scientific possibility, engineering feasibility, and business profitability. His working field is (mostly non-contact) future dimensional technologies that are accurate, fast, traceable, and robust.

General Manager at Mitutoyo

Beibei Wu (Senior Engineer) is now working on the development of testing design kits (TDKs) technology for silicon photonics automatic wafer-level testing platform. She received her doctorate degree in optical engineering from Huazhong University of Science and Technology, Wuhan, China. She has more than 10 years of experience in silicon photonics research and development, with research focus on integrated optoelectronic device and processing design kits (PDKs) for silicon photonics.

Beibei Wu
Senior Engineer at O'Shenu

Johannes Zettler (Product Manager) is a product manager and team lead at LayTec AG, a Berlin-based company that develops and manufactures optical metrology for the semiconductor industry. Johannes obtained his Ph.D. in experimental physics from the Humboldt University of Berlin in 2015 for his research on the growth of gallium nitride nanowires. As an R&D project manager he has led numerous product and technology developments. His expertise is the modelling and understanding of optical measurements, physical growth processes and semiconductor layer structures as well as the development of suitable advanced algorithms. Since 2023 he is leading the EpiX wafer mapping team. Johannes has a passion for organizational development and new work.

Product Manager at LayTec

Patrik Lundström (CEO) holds an MSc in Business Administration from Lund University. He has more than 25 years’ experience from electronics and semiconductor industry with focus on management, sales, R&D as well as manufacturing. He joined Obducat in 2000 and was appointed CEO in 2002. Before joining Obducat he worked at Meget AB (part of Assa Abloy today), a leading player within the RFID industry. Early on he worked with electronics manufacturing having the responsibility for a lithography department.

Jeroen Visser (Quality & Business Development Manager) has been with SCIL Nanoimprint Solutions since April 2020, where he is responsible for managing quality and business development initiatives. Jeroen studied Chemical Process Engineering at Fontys University of Applied Sciences and Business Administration at NCOI Opleidingen. He also participated in the Fokker Young Potential Program in High Impact Presentation, Communication Skills, Strategy, Project Management, and Financial Management.

Quality & Business development Manager at SCIL Nanoimprint Solutions

Arne Schleunitz (CTO) was appointed as Chief Technology Officer (CTO) in 2016. He is responsible for technical sales and worldwide innovation exploitation at MRT. After studying electrical engineering at the TU Berlin with a focus on microsystems technology and a research stay in the USA at the University of Maryland, he received his doctorate from the Karlsruhe Institute of Technology (KIT) on the topic of micro- and nanostructuring using nanoimprint lithography. As a post-doctoral student at the Paul Scherrer Institute (PSI) in Switzerland, he deepened his process knowledge in micro and nanofabrication before starting his involvement in the company in 2012 as head of technology management.

Chief Technology Officer at Micro Resist Technology

Shingo Yoshikawa (Senior Technical Director) is a Senior Technical Director in Photomask at DNP Dai Nippon Printing, where he has overseen semiconductor processes and equipment since April 2022. Prior to this role, Shingo served as Photomask Technical Director for six years and as an Expert Engineer, accumulating over 15 years of expertise in photomask technology and semiconductor processes. Shingo holds a Master of Technology in Electronics Engineering from Nihon University (2004).

Senior Technical Director at Dai Nippon Printing

Jörg Thümmel (Applications Engineer Metrology) is an Applications Engineer at Hitachi-Hightech, where he has been specializing in metrology and supporting semiconductor manufacturers since 2012. As an application expert in CD-SEMs and defect inspection equipment, Jörg has a wealth of experience in advanced semiconductor applications, accumulated since he began working in this field in 1998. Jörg holds a Dipl.-Ing. in Electrical Engineering.

Jörg Thümmel
Applications Engineer Metrology at Hitachi Group

Mohand Achouche (Strategy Advisor) is a Senior Strategic Advisor on devices / 6G and high speed business relationship within Nokia Bell Labs since 2019. From 2015 to 2019, he was the managing director of III-V Lab a JV between Nokia, Thales and CEA. He contributed to the creation of various III-V Lab’s spin-offs and leaded multiple industrial transfers. Mohand received his PhD degree in material science from Paris VII University in 1996. His research activities started at Orange lab in 1993 on Photonic Integrated Circuits for optical communications. During 1997-2000, he was with Ferdinand Braun Institute (Berlin) working on electronic power amplifiers for mobile communications. He joined Alcatel (now Nokia) in 2000 working on various research projects and had many different managerial roles.

Director of Hardware Strategy at Nokia Bell Labs

Clau Maissen (Product Marketing Manager) earned his PhD degree in 1992 at ETH Zürich, Switzerland. He started his business life at Balzers in the R&D department for high rate sputtering of optical coatings. Over the last 30+ years he held various management positions in the field of optical coatings and systems, thin film solar cells equipment development and manufacturing. He joined Evatec in March 2018 to further develop the photonic business at Evatec.

Clau Maissen
Senior Product Marketing Manager, Compound & Photonics at Evatec

Stephan Suckow (Group Leader Nanophotonics) obtained his B.Sc. and M.Sc. in Physics of Semiconductor Technology from the BTU Cottbus, Germany, and his PhD in Physics from RWTH Aachen University in 2012 on the simulation of photonic silicon nanostructures. He joined AMO in 2015, became the vice head of the Nanophotonics group in 2018 and is leading the group since 2022. He coordinated the H2020 project POSEIDON, is the technical manager of the H2020 Project GRACED and coordinates the work at AMO for several other national and European funded projects.

Group Leader Nanophotonics at AMO

Nikolaus Flöry (CTO) is a technology enthusiast specializing in photonics and emerging technologies. In his role as CTO & Business Development at vario-optics, he consults project partners and customers on the development of miniaturized photonic applications and products using photonic integrated circuits. His work involves daily interactions with a diverse range of specialists across various disciplines, and he leverages his interest in communicating science and technology through the creation of papers, articles, and conference presentations. He holds a Ph.D. in Optics/Optical Sciences from ETH Zürich.

Ghassan Barbar (Sales Director) received the chemical engineering degree from the university of Applied Science, Berlin, Germany in 2001. In 2022 he took over the position of sales director at ELEMENT 3-5 GmbH with a special focus on the product management for the ACCELERATOR 3500K. Prior to this, he worked as an independent consultant in the semiconductor industry. Before that, he joined Ebner Group in 2011 and held several roles within the sapphire department (FAMETEC) In 2018, he built up within the group SiC crystal growth division, which is a spin-off company (EEMCO) since 2020. Before that, he worked at AIXTRON in R&D for development of high-k and metal gate for CMOS applications by CVD/PECVD. Ghassan holds over 15 patents in crystal growth of Sapphire and SiC.

Sales Director at ELEMENT 3-5

Stefano Bonifacio (Advanced Engineering Manager) joined Flex in 2015, after almost 20 years of experience as Test and Process Engineering manager in the Optics business division at Alcatel. He holds a degree on Telecommunication Engineering at the University of Trieste, Italy (1996). Stefano was responsible for managing New Product Introduction and Industrialization, several optical products transfer and localization projects, the setup of capabilities of integration and testing on terminals and complete optical networks in the manufacturing sites. Within Flex, in 2017 he has been appointed leader of the initiative “Flex Optical Center of Excellence” with the aim to foster optical competence in new manufacturing sites in the company.

Manufacturing Engineering Manager at Flex

Jérôme Mouly (Business Line Deputy Director) manages the expansion of the technical expertise and market know-how of the team. In addition, Jerome’s mission focusses on the management of business relationships with company leaders and the development of market research and strategy consulting activities. He has conducted more than 100 marketing and technological analyses for industrial groups, start-ups, and institutes in the field of MEMS and sensing technologies. Jérôme has been also deeply engaged in Yole Group’s finance activities with a dedicated focus on the commercial exploitation of smart system technologies and access to funding opportunities. Jérôme is regularly involved in international conferences, with presentations and keynotes. Jérôme Mouly earned a Master of Physics degree from the University of Lyon (FR).

Deputy Director at YOLE Group

Anton Alexeev (Business Development Manager) focuses on nanoimprint lithography, 3D and heterogeneous integration. Anton received his PhD in electrical engineering from the Eindhoven University of Technology where he also graduated Professional Doctorate in Engineering program in physics. He has years of professional experience in the semiconductor industry. He worked on variety of technologies ranging from visible light communication via LED with Philips Lighting to optimization of the overlay performance for the leading-edge semiconductor manufacturing nodes with ASML.

Business Development Manager at EV Group
Attendees
Sponsor
Silver
Technology Manager
Technology scope and agenda
Ivan Nikitski, PhD
Ivan Nikitski, PhD
Technology Expert for Quantum and Integrated Photonics
Programme Manager
Coordination
Lídia Briquets
Lídia Briquets
Programme Manager
Event Manager
Logistics, venue, accommodation, and transportation
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